Glow Discharge Processes: Sputtering and Plasma Etching
by Brian Chapman
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| Publisher: | John Wiley & Sons |
| Published In: | 05-Nov-1980 |
| ISBN-10: | 047107828X |
| ISBN-13: | 9780471078289 |
| Binding Type: | Hardback |
| Weight: | 912 gms |
| Pages: | pp. 432 |
The Title "Glow Discharge Processes: Sputtering and Plasma Etching " is written by Brian Chapman . This book was published in the year 1980. The ISBN number 047107828X|9780471078289 is assigned to the Hardback version of this title. The publisher of this title is John Wiley & Sons. We have about 122795 other great books from this publisher.