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Glow Discharge Processes: Sputtering and Plasma Etching

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Glow Discharge Processes: Sputtering and Plasma Etching,047107828X,9780471078289

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Book Information

Publisher:John Wiley & Sons
Published In:05-Nov-1980
ISBN-10:047107828X
ISBN-13:9780471078289
Binding Type:Hardback
Weight:912 gms
Pages:pp. 432

The Title "Glow Discharge Processes: Sputtering and Plasma Etching " is written by Brian Chapman . This book was published in the year 1980. The ISBN number 047107828X|9780471078289 is assigned to the Hardback version of this title. The publisher of this title is John Wiley & Sons. We have about 122795 other great books from this publisher.

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