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Tribology in Chemical-Mechanical Planarization

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Tribology in Chemical-Mechanical Planarization,0824725670,9780824725679

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Book Information

Publisher:Taylor & Francis Group
Published In:01-Mar-2005
ISBN-10:0824725670
ISBN-13:9780824725679
Binding Type:Hardback
Weight:514 gms
Pages:pp. 185, 24 equations

The Title "Tribology in Chemical-Mechanical Planarization 1st Edition" is written by Hong Liang. This book was published in the year 2005. The ISBN number 0824725670|9780824725679 is assigned to the Hardback version of this title. This book has total of pp. 200 (Pages). The publisher of this title is Taylor & Francis Group. We have about 143359 other great books from this publisher.

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